Machining, Measurement, and Control Laboratory

Disturbance Force Analysis in High Precision Positioning System
Tomoya Fujita, Atsushi Matsubara

This paper describes a characterization method of disturbance force of a linear drive system supported by high-precision rolling guideways. Disturbance force of linear drive system is divided into the friction component and other disturbance force. Experimental characterization method to analyze influence of global position, micro position and velocity is suggested. With stop-dwell-go and reversal motions, disturbance force in a linear drive system with linear ball guideway is analyzed.