Machining, Measurement, and Control Laboratory

Nano Positioning Drive with Piezoelectric Actuator Integrated into Support Ball Screw
Tomoya Fujita, Atsushi Matsubara, Daisuke Kono

This paper presents a new fine and coarse (dual) positioning system with a piezoelectric actuator integrated into the support unit of a ball screw. In order to drive the fine and the coarse motion mechanism synchronously, a new controller is designed. We tune control parameters and simulate tracking performance by using the dynamic model of the system. After that, positioning tests were carried out. Test results show that the positioning system has good tracking capability with a tracking error less than 0.2 um with decreasing the stick motion.
Key Words: Dual Control, Piezoelectric Actuator, Ball screw, Fine motion