Machining, Measurement, and Control Laboratory
 

 
 
 
 
Laser Step Diagonal Measurement for the Estimation of Three-dimensional Volumetric Errors
 
Takafumi Hata, Soichi Ibaraki, Atsushi Matsubara
 
 
 
Abstract

The laser step diagonal measurement is a method for the identification of all the volumetric error components, including linear displacement errors, straightness and squareness errors by using only a laser interferometer and a flat mirror. This research first discusses inherent and critical issues with the conventional formulation of the laser step diagonal measurement. Then, we propose a new formulation of the laser step diagonal measurement to accurately estimate the machine’s volumetric errors even under the existence of setup errors.
 
Key Words: Step diagonal measurement, volumetric error, laser interferometer