Machining, Measurement, and Control Laboratory

High-precision Machining by Measurement and Compensation of Motion Error
Daisuke Kono, Atsushi Matsubara

In high-precision machining, it is important to control the motion errors of a tool tip. However, it is difficult to estimate these motion errors from those of a position different from the tool tip because of the angular motion of machines. The purpose of this paper is to evaluate the influence of this angular motion, to estimate the motion errors of the tool tip and to compensate them. Translational and angular components of the motion errors in Z direction were measured separately by using two displacement sensors and the motion errors of the tool tip were modeled by using Fourier series. A compensation experiment was conducted and the straightness of the tool tip was reduced from 2.0 um to 0.1 um.
Key Words: High-precision Machining, Motion error, Compensation