Machining, Measurement, and Control Laboratory
 

 
 
 
 
Vibration Analysis of Micromilling Machine
 
Yoko Hirono, Atsushi Matsubara, Takahiko Hirooka
 
 
 
Abstract

These days, machine parts are fabricated in micro scale. The influence of the relative vibration between a tool and a work-piece on machining accuracy is unignorable. There are two causes for the relative vibration. One is the floor oscillation disturbance introduced from the floor. The other is the machine’s own oscillation disturbance arisen from the motion of a table and a tool. In this paper, the subject is a ball-screw-driven 3-axis micro-milling machine. How whether the passive vibration isolation system using compressed air is available or not influences on the relative vibration between a tool and a work-piece is investigated. By using a vibration isolation system, the floor oscillation disturbance was isolated, and the base vibration caused by the machine’s own oscillation disturbance was isolated. However the internal vibration was excited.
 
Key Words: vibration, passive vibration isolation, machine tool, frequency response, resonant frequency