Machining, Measurement, and Control Laboratory

High-precision machining by measurement and compensation of motion error
Daisuke Kono, Atsushi Matsubara, Iwao Yamaji, Tomoya Fujita

In order to achieve sub-micron-order geometrical accuracy efficiently, motion errors of machine tools should be reduced. This paper reports on a compensation result of motion errors in Z direction on XY plane. The repeatable error components due to the ball screw drive systems were modelled by using Fourier series. Z-axis was commanded to cancel the estimated motion errors and the variation of the relative displacement of the tool to the table was reduced from 1.3 umP-V to 0.5 umP-V. Machining experiments were also carried out and the straightness of the profile curve was reduced from 1.0 um to 0.4 um.
Key Words: Compensation, Motion error, High-precision machining, Straightness