Kyoto University Graduate School of Engineering Department of Micro Engineering
Machining Measurement and Control Laboratory

High-precision and Ultra-precision Positioning and Machining

For ultra-precision machine tools and high-precision machine tools, we have been researching on various issues related to high-precision positioning technologies, and machining technologies based on them.

As technological progress has been advancing in latest higher-performance, lower-cost digital home electronics such as digital cameras, DVD recorders, and flat panel displays, ultra-precision machine tools (with the positioning resolution from 1 to 0.1 nm) and high-precision machine tools (with the positioning resolution from 0.1um to 10 nm) have been widely accepted in today's market to machine, for example, high-precision dies and molds for optical parts, or electrical parts. Our research group has been researching on various technologies related to high-precision and ultra-precision positioning from the viewpoint of control, measurement, and mechatronics.

High-precision Machining based on Measurement and Compensation of Motion Errors High-precision Machining based on Measurement and Compensation of Motion Errors
With on-line measurement and compensation of motion errors of a machine tool, high-precision machining can be done in a cost-effective manner. (March 2008)

Vibration Analysis and Control of a High-precision Machine Tool Vibration Analysis and Control of a High-precision Machine Tool
The quantitative analysis of the effect of external or internal vibration on the sub-micrometer level high-precision machining, as well as its control schemes, is studied. (March 2008)

High-precision Positioning by Piezoactuator-integrated Ball Screw Drive High-precision Positioning by Piezoactuator-integrated Ball Screw Drive
We developed a high-precision positioning drive integrating the fine control by a piezo-actuator and the coarse control by a ball screw. It is applied to the compensation of a tool's Z-position in high-precision machining. (March 2008).

On Ultra-precision Control of Ball-Screw Driven Feed Drives On Ultra-precision Control of Ball-Screw Driven Feed Drives
A ball screw driven feed drive is still a dominant actuator in today's machine tools. The possibility and issues with the ultra-precision positioning by a ball screw driven feed drive has been investigated. We made the test stand driven by a high-precision ball screw and a hydrostatic guideway (March, 2005).